Title: Depth profiling with oxygen beams
Authors: Vandervorst, Wilfried ×
Alay, Josep Lluis
Brijs, Bert
De Coster, Walter
Elst, Kathy #
Issue Date: 1994
Host Document: pages:599-608
Conference: SIMS IX. Proceedings of the 9th International Conference on Secondary Ion Mass Spectrometry; 7-12 November 1993; Yokohama, Japan location:Leuven Belgium
Publication status: published
KU Leuven publication type: IC
Appears in Collections:Nuclear and Radiation Physics Section
× corresponding author
# (joint) last author

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