ITEM METADATA RECORD
Title: Two-dimensional spreading resistance profiling: recent understandings and applications
Authors: Vandervorst, Wilfried ×
Privitera, Vittorio
Raineri, Vito
Clarysse, Trudo
Pawlik, M #
Issue Date: 1994
Series Title: J. Vac. Sci. Technol. B vol:12 issue:1 pages:276-282
Publication status: published
KU Leuven publication type: IT
Appears in Collections:Electrical Engineering - miscellaneous
× corresponding author
# (joint) last author

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