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Title: Spectroscopic Study of Oxygen Related Lattice Defects in Annealed Silicon
Authors: Vanhellemont, Jan
Libezny, Milan
Simoen, Eddy
Claeys, Cor
Clauws, P
Blondeel, A
Issue Date: 1994
Conference: 22nd International Conference on Physics of Semiconductors; August 15-19, 1994; Vancouver, Canada. location:Leuven Belgium
Publication status: published
KU Leuven publication type: DI
Appears in Collections:Electrical Engineering - miscellaneous
Associated Section of ESAT - INSYS, Integrated Systems

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