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Title: Correlation between trench depth and TDDB thermal activation energy in single damascene Cu/SiOC:H
Authors: Li, Yunlong ×
Ciofi, Ivan
Visalli, Domenica
Van Aelst, Joke
Groeseneken, Guido
Maex, Karen
Tokei, Zsolt #
Issue Date: 2006
Series Title: Microelectronic Engineering vol:83 issue:11/12/07 pages:2179-2183
ISSN: 0167-9317
Publication status: published
KU Leuven publication type: IT
Appears in Collections:Electrical Engineering - miscellaneous
Associated Section of ESAT - INSYS, Integrated Systems
ESAT - MICAS, Microelectronics and Sensors
× corresponding author
# (joint) last author

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