ITEM METADATA RECORD
Title: Diffusion barrier integrity evaluation by ellipsometric ellipsometry
Authors: Shamiryan, Denis ×
Baklanov, Mikhaïl
Maex, Karen #
Issue Date: 2003
Series Title: Journal of Vacuum Science & Technology B vol:21 issue:1 pages:220-223
ISSN: 1071-1023
Publication status: published
KU Leuven publication type: IT
Appears in Collections:Associated Section of ESAT - INSYS, Integrated Systems
× corresponding author
# (joint) last author

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