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Title: The novel use of low temperature hydrogenated microcrystalline silicon germanium (µcSiGe:H) for MEMS applications
Authors: Gromova, Maria ×
Baert, Kris
Van Hoof, Chris
Mehta, A
Witvrouw, Ann #
Issue Date: 2004
Series Title: Microelectronic Engineering vol:76 issue:1-4 pages:266-271
ISSN: 0167-9317
Publication status: published
KU Leuven publication type: IT
Appears in Collections:Electrical Engineering - miscellaneous
ESAT - MICAS, Microelectronics and Sensors
× corresponding author
# (joint) last author

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