Title: Island growth as a growth mode in atomic layer deposition: a phenomenological model
Authors: Puurunen, Riikka ×
Vandervorst, Wilfried #
Issue Date: 2004
Series Title: Journal of Applied Physics vol:96 issue:12 pages:7686-7695
ISSN: 0021-8979
Publication status: published
KU Leuven publication type: IT
Appears in Collections:Electrical Engineering - miscellaneous
× corresponding author
# (joint) last author

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