Title: Integration of HSQ in the direct-on-metal approach for 0.25-µm technology
Authors: Gao, Teng ×
Witvrouw, Ann
Coenegrachts, Bart
Bruynseraede, Christophe
Van Hove, Marleen
Maex, Karen #
Issue Date: 2000
Series Title: Microelectronic Engineering vol:50 pages:349-355
ISSN: 0167-9317
Publication status: published
KU Leuven publication type: IT
Appears in Collections:Associated Section of ESAT - INSYS, Integrated Systems
× corresponding author
# (joint) last author

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