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Title: Integration of solid phase epitaxial re-growth, flash and sub-melt laser annealing for S/D junctions in CMOS digital technology
Authors: Severi, Simone ×
Augendre, Emmanuel
De Meyer, Christina #
Issue Date: Apr-2006
Publisher: MRS
Host Document: pages:77-89
Conference: Doping Engineering for Device Fabrication location:Leuven Belgium date:17/04/06
Publication status: published
KU Leuven publication type: IC
Appears in Collections:Associated Section of ESAT - INSYS, Integrated Systems
Electrical Engineering - miscellaneous
× corresponding author
# (joint) last author

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