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Title: Enhanced activation of standard and cocktail spike annealed junctions with additional sub-melt laser anneal
Authors: Severi, Simone ×
Augendre, Emmanuel
Pawlak, Bartek
Eyben, Pierre
Noda, Taiji
Felch, Susan
Falepin, Annelies
Parihar, Vijay
Schreutelkamp, Rob
Vandervorst, Wilfried
De Meyer, Christina #
Issue Date: Apr-2006
Publisher: MRS
Host Document: pages:39-44
Conference: Doping Engineering for Device Fabrication location:Leuven Belgium date:17/04/06
Publication status: published
KU Leuven publication type: IC
Appears in Collections:Electrical Engineering - miscellaneous
Associated Section of ESAT - INSYS, Integrated Systems
× corresponding author
# (joint) last author

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