Title: Effect of silicidation schemes on interface contact resistance
Authors: Wang, Qingfeng ×
Lauwers, A
Deweerdt, Bruno
Maex, Karen #
Issue Date: 1994
Host Document: pages:283-286
Conference: ESSDERC'94. Proceedings of the 24th European Solid State Device Research Conference; 11-15 September 1994; Edinburgh, UK. location:Leuven Belgium
Publication status: published
KU Leuven publication type: IC
Appears in Collections:Associated Section of ESAT - INSYS, Integrated Systems
× corresponding author
# (joint) last author

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