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Title: Physical characterization of mixed HfAlOx layers by complementary analysis techniques
Authors: Bender, Hugo ×
Conard, Thierry
Richard, Olivier
Brijs, Bert
Petry, Jasmine
Vandervorst, Wilfried
Defranoux, C
Boher, P
Rochat, N
Wyon, C
Mack, P
Wolstenholme, J
Vitchev, E
Houssiau, L
Pireaux, J-J
Bergmaier, A
Dollinger, G #
Issue Date: Jun-2004
Publisher: Elsevier Sequoia
Series Title: Materials Science and Engineering B, Solid-State Materials for Advanced Technology vol:109 issue:1-3 pages:60-63
ISSN: 0921-5107
Publication status: published
KU Leuven publication type: IT
Appears in Collections:Electrical Engineering - miscellaneous
× corresponding author
# (joint) last author

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