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Title: Superior N- and PMOSFET scalability using carbon co-implantation and spike annealing
Authors: Augendre, Emmanuel ×
Pawlak, Bartek
Kubicek, Stefan
Hoffmann, Thomas Y
Chiarella, Thomas
Kerner, Christoph
Severi, Simone
Falepin, Annelies
Ramos, Javier
De Keersgieter, An
Eyben, Pierre
Vanhaeren, Danielle
Vandervorst, Wilfried
Jurczak, Malgorzata
Absil, Philippe
Biesemans, Serge #
Issue Date: Sep-2006
Publisher: EPFL
Host Document: pages:355-358
Conference: ESSDERC. Proceedings of the 36th European Solid-State Device Research Conference location:Leuven Belgium date:18/09/06
Publication status: published
KU Leuven publication type: IC
Appears in Collections:Associated Section of ESAT - INSYS, Integrated Systems
Electrical Engineering - miscellaneous
× corresponding author
# (joint) last author

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