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Title: Processing factors influencing the leakage current in shallow junction diodes for deep submicron CMOS
Authors: Grau, Lluis ×
Augendre, Emmanuel
Simoen, Eddy
Rooyackers, Rita
Claeys, Cor
Badenes, Gonçal
Romano-Rodriguez, A #
Issue Date: 2000
Host Document: pages:11-14
Conference: 3rd International Conference Materials for Microelectronics; 16-17 October 2000; Dublin, Ireland. location:Leuven Belgium
Publication status: published
KU Leuven publication type: IC
Appears in Collections:Electrical Engineering - miscellaneous
Associated Section of ESAT - INSYS, Integrated Systems
× corresponding author
# (joint) last author

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