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Title: Processing factors influencing the leakage current in shallow junction diodes for deep submicron CMOS
Authors: Grau, Lluis ×
Augendre, Emmanuel
Simoen, Eddy
Rooyackers, Rita
Claeys, Cor
Badenes, Gonçal
Romano-Rodriguez, A #
Issue Date: 2000
Publisher: Chapman and Hall
Series Title: Journal of Materials Science. Materials in Electronics vol:12 issue:4-6 pages:211-214
Conference: 3rd International Conference Materials for Microelectronics location:Dublin, Ireland date:16-17 October 2000
ISSN: 0957-4522
Publication status: published
KU Leuven publication type: IT
Appears in Collections:Electrical Engineering - miscellaneous
Associated Section of ESAT - INSYS, Integrated Systems
× corresponding author
# (joint) last author

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