Title: A method to evaluate internal cavity pressure of sealed MEMS devices
Authors: De Coster, Jeroen ×
Jourdain, Anne
Puers, Robert
Tilmans, Harrie #
Issue Date: 2005
Publisher: IMAPS
Host Document: pages:599-603
Conference: Proceedings 15th European Microelectronics and Packaging Conference - EPMC location:Leuven Belgium date:12/06/05
Publication status: published
KU Leuven publication type: IC
Appears in Collections:ESAT - MICAS, Microelectronics and Sensors
ESAT - ELECTA, Electrical Energy Computer Architectures
× corresponding author
# (joint) last author

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