Title: Ion-beam induced oxidation of GaAs and AlGaAs
Authors: Alay, Josep Lluis ×
Vandervorst, Wilfried
Bender, Hugo #
Issue Date: 1995
Series Title: J. Appl. Phys. vol:77 issue:7 pages:3010-22
Publication status: published
KU Leuven publication type: IT
Appears in Collections:Electrical Engineering - miscellaneous
× corresponding author
# (joint) last author

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