Title: Empirical and theoretical characterisation of electrostatically driven MEMS structures with stress gradients
Authors: De Coster, Jeroen ×
Tilmans, Harrie
den Toonder, J.M.J
van Beek, J.T.M
Rijks, T.G.S.M
Steeneken, P.G
Puers, Robert #
Issue Date: 2005
Publisher: Elsevier Science Pub. Co.
Series Title: Sensors and actuators. A: Physical vol:123-124 pages:555-562
ISSN: 0924-4247
Publication status: published
KU Leuven publication type: IT
Appears in Collections:ESAT - MICAS, Microelectronics and Sensors
ESAT - ELECTA, Electrical Energy Computer Architectures
× corresponding author
# (joint) last author

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