Title: Geometry effect on impurity incorporation and grain growth in narrow copper lines
Authors: Zhang, Wenqi ×
Brongersma, Sywert
Heylen, Nancy
Beyer, Gerald
Vandervorst, Wilfried
Maex, Karen #
Issue Date: 2005
Publisher: Electrochemical Society
Series Title: Journal of the Electrochemical Society vol:152 issue:12 pages:C832-C837
ISSN: 0013-4651
Publication status: published
KU Leuven publication type: IT
Appears in Collections:Electrical Engineering - miscellaneous
Associated Section of ESAT - INSYS, Integrated Systems
× corresponding author
# (joint) last author

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