Title: Corrosion and inhibition of WNxCy barrier during chemical mechanical planarization
Authors: Ernur, Didem ×
Terzieva, Valentina
Schuhmacher, Jorg
Sutcliffe, Victor
Whelan, Caroline
Maex, Karen #
Issue Date: 2005
Series Title: Journal of the Electrochemical Society vol:152 issue:12 pages:B512-B518
ISSN: 0013-4651
Publication status: published
KU Leuven publication type: IT
Appears in Collections:Associated Section of ESAT - INSYS, Integrated Systems
× corresponding author
# (joint) last author

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