|ITEM METADATA RECORD
|Title: ||Corrosion and inhibition of WNxCy barrier during chemical mechanical planarization|
|Authors: ||Ernur, Didem ×|
Maex, Karen #
|Issue Date: ||2005 |
|Series Title: ||Journal of the Electrochemical Society vol:152 issue:12 pages:B512-B518|
|Publication status: ||published|
|KU Leuven publication type: ||IT|
|Appears in Collections:||Associated Section of ESAT - INSYS, Integrated Systems|
× corresponding author|
# (joint) last author|
|Files in This Item:
There are no files associated with this item.
Request a copy
All items in Lirias are protected by copyright, with all rights reserved.
© Web of science