ITEM METADATA RECORD
Title: Challenges for structural stability of ultra-low-k based interconnects
Authors: Iacopi, Francesca ×
Brongersma, Sywert
Vandevelde, Bart
Travaly, Youssef
Maex, Karen #
Issue Date: 2004
Series Title: Microelectronic Engineering vol:75 issue:1 pages:54-62
ISSN: 0167-9317
Publication status: published
KU Leuven publication type: IT
Appears in Collections:Associated Section of ESAT - INSYS, Integrated Systems
× corresponding author
# (joint) last author

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