|ITEM METADATA RECORD
|Title: ||Damage minimized plasma pore sealing of microporous low k dielectrics|
|Authors: ||Abell, Thomas ×|
Maex, Karen #
|Issue Date: ||2004 |
|Series Title: ||Microelectronic Engineering vol:76 issue:01/04/07 pages:16-19|
|Publication status: ||published|
|KU Leuven publication type: ||IT|
|Appears in Collections:||Associated Section of ESAT - INSYS, Integrated Systems|
× corresponding author|
# (joint) last author|
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