Title: Damage minimized plasma pore sealing of microporous low k dielectrics
Authors: Abell, Thomas ×
Maex, Karen #
Issue Date: 2004
Series Title: Microelectronic Engineering vol:76 issue:01/04/07 pages:16-19
ISSN: 0167-9317
Publication status: published
KU Leuven publication type: IT
Appears in Collections:Associated Section of ESAT - INSYS, Integrated Systems
× corresponding author
# (joint) last author

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