Title: Fabrication of strained Si nMOSFET transistors on thin buffer layers with selective and non-selective epitaxial growth layers
Authors: Eneman, Geert ×
Verheyen, Peter
Rooyackers, Rita
Delhougne, Romain
Loo, Roger
Caymax, Matty
Meunier-Beillard, Philippe
De Meyer, Christina
Vandervorst, Wilfried #
Issue Date: Feb-2005
Publisher: Pergamon
Series Title: Materials Science in Semiconductor Processing vol:8 issue:1-3 pages:337-342
ISSN: 1369-8001
Publication status: published
KU Leuven publication type: IT
Appears in Collections:Electrical Engineering - miscellaneous
Associated Section of ESAT - INSYS, Integrated Systems
× corresponding author
# (joint) last author

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