Title: Heavy ion implantation in Ge: dramatic radiation induced morphology in Ge
Authors: Janssens, Tom
Huyghebaert, Cedric
Vanhaeren, Danielle
Winderickx, Gillis
Satta, Alessandra
Meuris, Marc
Vandervorst, Wilfried
Issue Date: 2005
Conference: 8th International Workshop on the Fabrication, Characterization and Modeling of Ultra-Shallow Junctions in Semiconductors location:Leuven Belgium date:05/06/05
Publication status: published
KU Leuven publication type: DI
Appears in Collections:Electrical Engineering - miscellaneous

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