Title: Effect of varying the initial conditions prior to flash-assist rapid thermal processing on dopant activation, diffusion, and defect populations
Authors: Camillo-Castillo, Renata
Law, M.E
Lindsay, Richard
Maex, Karen
Pawlak, Bartek
McCoy, S
Issue Date: 2005
Conference: 8th International Workshop on the Fabrication, Characterization and Modeling of Ultra-Shallow Junctions in Semiconductors location:Daytona Beach, FL, USA date:05/06/05
Publication status: published
KU Leuven publication type: DI
Appears in Collections:Associated Section of ESAT - INSYS, Integrated Systems

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