Title: Study of thermal stability of nickel silicide by x-ray reflectivity
Authors: Van Hove, Marleen ×
Travaly, Youssef
Sajavaara, Timo Pekka
Brijs, Bert
Vandervorst, Wilfried
Lauwers, Anne
Chamirian, Oxana
Kittl, Jorge
Jonas, Alain
Maex, Karen #
Issue Date: Dec-2005
Series Title: Microelectronic Engineering vol:82 issue:3-4 pages:492-496
ISSN: 0167-9317
Publication status: published
KU Leuven publication type: IT
Appears in Collections:Nuclear and Radiation Physics Section
Electrical Engineering - miscellaneous
Associated Section of ESAT - INSYS, Integrated Systems
× corresponding author
# (joint) last author

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