Title: Energy and angular dependent profiling of thin (0.5 - 2.5 nm) oxide layers
Authors: Vandervorst, Wilfried
Conard, Thierry
De Witte, Hilde
Cooke, G. A
Issue Date: 1999
Conference: SIMS XII; 5-10 September 1999; Brussel, Belgium. location:Leuven Belgium
Publication status: published
KU Leuven publication type: DI
Appears in Collections:Electrical Engineering - miscellaneous

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