|ITEM METADATA RECORD
|Title: ||Energy and angular dependent profiling of thin (0.5 - 2.5 nm) oxide layers|
|Authors: ||Vandervorst, Wilfried|
De Witte, Hilde
Cooke, G. A
|Issue Date: ||1999 |
|Conference: ||SIMS XII; 5-10 September 1999; Brussel, Belgium. location:Leuven Belgium|
|Publication status: ||published|
|KU Leuven publication type: ||DI|
|Appears in Collections:||Electrical Engineering - miscellaneous|
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