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Title: Inhibition of galvanic corrosion of WNC barrier metal for reliable Cu CMP
Authors: Ernur, Didem ×
Terzieva, Valentina
Schuhmacher, Jorg
Maex, Karen #
Issue Date: 2004
Conference: AIChE Annual Meeting: Interfacial Phenomena in Semiconductor Processing location:Austin USA date:07/11/04
Publication status: published
KU Leuven publication type: IC
Appears in Collections:Associated Section of ESAT - INSYS, Integrated Systems
× corresponding author
# (joint) last author

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