ITEM METADATA RECORD
Title: Interaction of a variety of ashing plasma with MSQ low-k dielectric
Authors: Le, Quoc Toan ×
Patz, M
Struyf, Herbert
Baklanov, Mikhaïl
Boullart, Werner
Vanhaelemeersch, Serge
Maex, Karen #
Issue Date: 2004
Publisher: ECS
Conference: Extended Abstracts of the 205th Meeting of the Electrochemical Society location:San Antonio, TX, USA date:09/05/04
Publication status: published
KU Leuven publication type: IMa
Appears in Collections:Associated Section of ESAT - INSYS, Integrated Systems
× corresponding author
# (joint) last author

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