|ITEM METADATA RECORD
|Title: ||Interaction of a variety of ashing plasma with MSQ low-k dielectric|
|Authors: ||Le, Quoc Toan ×|
Maex, Karen #
|Issue Date: ||2004 |
|Conference: ||Extended Abstracts of the 205th Meeting of the Electrochemical Society location:San Antonio, TX, USA date:09/05/04|
|Publication status: ||published|
|KU Leuven publication type: ||IMa|
|Appears in Collections:||Associated Section of ESAT - INSYS, Integrated Systems|
× corresponding author|
# (joint) last author|
|Files in This Item:
There are no files associated with this item.
All items in Lirias are protected by copyright, with all rights reserved.