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Title: Use of liquid rubber in micromachining focused on flexible large-area biocompatible membranes
Authors: Verhaegen, Katarina ×
Baert, Kris
Puers, Robert
Sansen, Willy
Hermans, Lou
Mertens, Robert #
Issue Date: 1999
Publisher: Scientific Pub. Division of MYU
Series Title: Sensors and materials vol:11 issue:2 pages:105-110
ISSN: 0914-4935
Publication status: published
KU Leuven publication type: IT
Appears in Collections:Electrical Engineering - miscellaneous
ESAT - MICAS, Microelectronics and Sensors
× corresponding author
# (joint) last author

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