Title: Impact of the barrier/dielectric interface quality on reliability of Cu porous-low-k interconnects
Authors: Tokei, Zsolt ×
Sutcliffe, Victor
Demuynck, Steven
Iacopi, Francesca
Roussel, Philippe
Beyer, Gerald
Hoofman, Romano
Maex, Karen #
Issue Date: 2004
Publisher: IEEE
Conference: Proceedings IEEE International Reliability Physics Symposium - IRPS location:Phoenix, AZ, USA date:27/04/04
Publication status: published
KU Leuven publication type: IC
Appears in Collections:Associated Section of ESAT - INSYS, Integrated Systems
× corresponding author
# (joint) last author

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