|ITEM METADATA RECORD
|Title: ||Correlation between barrier integrity and TDDB performance of copper porous low-k interconnects|
|Authors: ||Tokei, Zsolt ×|
Maex, Karen #
|Issue Date: ||2004 |
|Series Title: ||Microelectronic Engineering vol:76 issue:01/04/07 pages:70-75|
|Publication status: ||published|
|KU Leuven publication type: ||IT|
|Appears in Collections:||Associated Section of ESAT - INSYS, Integrated Systems|
× corresponding author|
# (joint) last author|
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