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Title: Plasma sealing of a low-k dielectric polymer
Authors: Martin Hoyas, Ana ×
Schuhmacher, Jorg
Whelan, Caroline M.
Celis, Jean-Pierre
Maex, Karen #
Issue Date: 2004
Series Title: Microelectronic Engineering vol:76 issue:01-04 pages:32-37
ISSN: 0167-9317
Publication status: published
KU Leuven publication type: IT
Appears in Collections:Electrical Engineering - miscellaneous
Chemical and Extractive Metallurgy Section (-)
Associated Section of ESAT - INSYS, Integrated Systems
× corresponding author
# (joint) last author

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