Title: Investigation of the formation of M-2(+)-molecular ions in sputtering processes
Authors: Vlekken, J ×
Croes, Kris
Wu, Ting-Di
D'olieslaeger, Marc
Knuyt, G
Vandervorst, Wilfried
De Schepper, Luc #
Issue Date: 1999
Series Title: Journal of the American Society for Mass Spectrometry vol:10 issue:3 pages:246-253
Publication status: published
KU Leuven publication type: IT
Appears in Collections:Electrical Engineering - miscellaneous
× corresponding author
# (joint) last author

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