Title: Composite nanoparticles for defectivity reduction during CMP
Authors: Armini, Silvia
Terzieva, Valentina
Vanhaelemeersch, Serge
Maex, Karen
Issue Date: 2004
Conference: Chemistry and Selfassembly for Nanotechnology location:Austin USA date:19/02/04
Publication status: published
KU Leuven publication type: DI
Appears in Collections:Associated Section of ESAT - INSYS, Integrated Systems

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