Title: Selective epitaxial deposition of strained silicon: a simple and effective method for fabricating high performance MOSFET devices
Authors: Delhougne, Romain ×
Eneman, Geert
Caymax, Matty
Loo, Roger
Meunier-Beillard, Philippe
Verheyen, Peter
Vandervorst, Wilfried
De Meyer, Christina
Heyns, Marc #
Issue Date: Aug-2004
Publisher: Pergamon Press
Series Title: Solid-State Electronics vol:48 issue:8 pages:1307-1316
ISSN: 0038-1101
Publication status: published
KU Leuven publication type: IT
Appears in Collections:Electrical Engineering - miscellaneous
Associated Section of ESAT - INSYS, Integrated Systems
× corresponding author
# (joint) last author

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