Title: Accurate electrical activation characterization of CMOS ultra-shallow profiles
Authors: Clarysse, Trudo ×
Dortu, Fabian
Vanhaeren, Danielle
Hoflijk, Ilse
Geenen, Luc
Janssens, Tom
Loo, Roger
Vandervorst, Wilfried
Pawlak, Bartek
Ouzeaud, V
Defranoux, C
Faifer, V.N
Current, M.I #
Issue Date: Dec-2004
Publisher: Elsevier Sequoia
Series Title: Materials Science and Engineering B, Solid-State Materials for Advanced Technology vol:114 pages:166-173
ISSN: 0921-5107
Publication status: published
KU Leuven publication type: IT
Appears in Collections:Electrical Engineering - miscellaneous
× corresponding author
# (joint) last author

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