Title: A)thermal migration of Ge during junction formation in s-Si grown on thin SiGe-buffer layers
Authors: Vandervorst, Wilfried ×
Pawlak, Bartek
Janssens, Tom
Brijs, Bert
Delhougne, Romain
Caymax, Matty
Loo, Roger #
Issue Date: 2004
Publisher: MRS
Host Document: pages:C9.5/B9.5
Conference: Silicon Front-End Junction Formation - Physics and Technology location:Leuven Belgium date:12/04/04
Publication status: published
KU Leuven publication type: IC
Appears in Collections:Electrical Engineering - miscellaneous
× corresponding author
# (joint) last author

Files in This Item:

There are no files associated with this item.

Request a copy


All items in Lirias are protected by copyright, with all rights reserved.