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Title: Growth and characterization of atomic layer deposited WC0.7N0.3 on polymer films
Authors: Martin Hoyas, Ana ×
Schuhmacher, Jorg
Shamiryan, Denis
Waeterloos, Joost
Besling, W
Celis, Jean-Pierre
Maex, Karen #
Issue Date: 2004
Series Title: Journal of Applied Physics vol:95 issue:1 pages:381-388
ISSN: 0021-8979
Publication status: published
KU Leuven publication type: IT
Appears in Collections:Electrical Engineering - miscellaneous
Chemical and Extractive Metallurgy Section (-)
Associated Section of ESAT - INSYS, Integrated Systems
× corresponding author
# (joint) last author

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