This item still needs to be validated !
Title: Corrosion of narrow copper damascene interconnects
Authors: Ernur, Didem ×
Terzieva, Valentina
Wu, Wen
Brongersma, Sywert
Maex, Karen #
Issue Date: 2004
Series Title: Journal of the Electrochemical Society vol:151 issue:12 pages:B636-B643
ISSN: 0013-4651
Publication status: published
KU Leuven publication type: IT
Appears in Collections:Associated Section of ESAT - INSYS, Integrated Systems
× corresponding author
# (joint) last author

Files in This Item:

There are no files associated with this item.

Request a copy


All items in Lirias are protected by copyright, with all rights reserved.

© Web of science