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Title: Corrosion of narrow copper damascene interconnects
Authors: Ernur, Didem ×
Terzieva, Valentina
Wu, Wen
Brongersma, Sywert
Maex, Karen #
Issue Date: 2004
Series Title: Journal of the Electrochemical Society vol:151 issue:12 pages:B636-B643
ISSN: 0013-4651
Publication status: published
KU Leuven publication type: IT
Appears in Collections:Associated Section of ESAT - INSYS, Integrated Systems
× corresponding author
# (joint) last author

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