Title: The formation of Pd seeded copper layer on TiN substrates by electroless deposition
Authors: Woo, Sig Min ×
Lantasov, Yuri
Palmans, Roger
Maex, Karen
Dong, Nyung Lee #
Issue Date: 1999
Host Document: pages:65-71
Conference: Advanced Metallization Conference in 1998. Proceedings of the Conference;
Publication status: published
KU Leuven publication type: IC
Appears in Collections:Associated Section of ESAT - INSYS, Integrated Systems
× corresponding author
# (joint) last author

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