|ITEM METADATA RECORD
|Title: ||The formation of Pd seeded copper layer on TiN substrates by electroless deposition|
|Authors: ||Woo, Sig Min ×|
Dong, Nyung Lee #
|Issue Date: ||1999 |
|Host Document: ||pages:65-71|
|Conference: ||Advanced Metallization Conference in 1998. Proceedings of the Conference;|
|Publication status: ||published|
|KU Leuven publication type: ||IC|
|Appears in Collections:||Associated Section of ESAT - INSYS, Integrated Systems|
× corresponding author|
# (joint) last author|
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