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Title: Integration of Pt/PZT/Pt ferroelectric capacitors into 0.5µm CMOS process for embedded FERAM
Authors: Wouters, D. J
Norga, Gerd
Haspeslagh, Luc
Deferm, Ludo
Maes, Herman
Issue Date: 1999
Conference: 11th International Symposium on Integrated Ferroelectrics - ISIF; 7-10 march 1999; Colorado Springs, Co, USA.
Publication status: published
KU Leuven publication type: DI
Appears in Collections:Electrical Engineering - miscellaneous
Associated Section of ESAT - INSYS, Integrated Systems

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