Title: Soft breakdown in very thin Ta2 O5 gate dielectric layers
Authors: Houssa, Michel ×
Mertens, Paul
Heyns, Marc
Heon, J. S
Halliyal, A
Ogle, B #
Issue Date: 2000
Publisher: Pergamon Press
Series Title: Solid-State Electronics vol:44 issue:3 pages:521-525
ISSN: 0038-1101
Publication status: published
KU Leuven publication type: IT
Appears in Collections:Semiconductor Physics Section
Clinical Residents Medicine
Surface and Interface Engineered Materials
× corresponding author
# (joint) last author

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