Title: Build-up of the altered layer as function of the ion-fluency in Si-Ge
Authors: Huyghebaert, Cedric
Brijs, Bert
Vandervorst, Wilfried
Issue Date: 2000
Conference: SIMS-Europe; 18-19 September 2000; Münster, Germany.
Publication status: published
KU Leuven publication type: DI
Appears in Collections:Nuclear and Radiation Physics Section
Electrical Engineering - miscellaneous

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