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Title: Studies on XLK; film characterization and integration in copper damascene processes
Authors: Iacopi, Francesca
Donaton, R
Coenegrachts, Bart
Komiya, Takayuki
Struyf, Herbert
Lepage, Muriel
Van Aelst, Joke
Boullart, Werner
De Roest, David
Vis, I
Baklanov, Mikhaïl
Vereecke, Guy
Van Hove, Marleen
Stucchi, Michele
Tokei, Zsolt
Meynen, Herman
Bremmer, J. N
Vanhaelemeersch, Serge
Maex, Karen
Issue Date: 2000
Conference: Advanced Metallization Conference (AMC) location:San Diego, CA, USA date:3-5 October 2000
Publication status: published
KU Leuven publication type: DI
Appears in Collections:Associated Section of ESAT - INSYS, Integrated Systems
Electrical Engineering - miscellaneous

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