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Title: In-situ characterization of the oxidation degree of the sputter surface and the oxygen enhancement of the ionization probability of Si
Authors: Janssens, Tom
Vandervorst, Wilfried
Issue Date: 2000
Conference: SIMS Workshop; 1-2 May 2000; Lake Tahoe, CA, USA. location:Leuven Belgium
Publication status: published
KU Leuven publication type: DI
Appears in Collections:Physics and Astronomy - miscellaneous
Electrical Engineering - miscellaneous

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