Title: Si(100) epitaxy by low-temperature UHV-CVD: AFM study of the initial stages of growth
Authors: Chollet, Frederic ×
André, E
Vandervorst, Wilfried
Caymax, Matty #
Issue Date: 1995
Series Title: J. Crystal Growth vol:157 issue:01/04/07 pages:161-7
Publication status: published
KU Leuven publication type: IT
Appears in Collections:Electrical Engineering - miscellaneous
× corresponding author
# (joint) last author

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