Title: Nanometer-scale roughness analysis of Si surfaces by TM-AFM for low-temperature epitaxy
Authors: Chollet, Frederic ×
Caymax, Matty
Vandervorst, Wilfried
André, E #
Issue Date: 1995
Host Document: pages:263-270
Conference: Proceedings of the Satellite Symposium to ESSDERC 95.ALTECH 95. Analytical Techniques for Semiconductor Materials and Process Ch
Publication status: published
KU Leuven publication type: IC
Appears in Collections:Electrical Engineering - miscellaneous
× corresponding author
# (joint) last author

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