|ITEM METADATA RECORD
|Title: ||Nanometer-scale roughness analysis of Si surfaces by TM-AFM for low-temperature epitaxy|
|Authors: ||Chollet, Frederic ×|
André, E #
|Issue Date: ||1995 |
|Host Document: ||pages:263-270|
|Conference: ||Proceedings of the Satellite Symposium to ESSDERC 95.ALTECH 95. Analytical Techniques for Semiconductor Materials and Process Ch|
|Publication status: ||published|
|KU Leuven publication type: ||IC|
|Appears in Collections:||Electrical Engineering - miscellaneous|
× corresponding author|
# (joint) last author|
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