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Title: Quantification of elements at the Si/SiO2-interface
Authors: Janssens, Tom ×
Vandervorst, Wilfried #
Issue Date: 2000
Host Document: pages:401-404
Conference: Secondary Ion Mass Spectrometry - SIMS XII. Proceedings of the 12th International Conference; 5-10 Sept. 1999; Brussel, Belgium. location:Leuven Belgium
Publication status: published
KU Leuven publication type: IC
Appears in Collections:Physics and Astronomy - miscellaneous
Electrical Engineering - miscellaneous
× corresponding author
# (joint) last author

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