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Title: Sputtering yield: Si and SiGe under O2-bombardment
Authors: Janssens, Tom
Vandervorst, Wilfried
Issue Date: 2000
Conference: SIMS-Europe; 18-19 September 2000; Münster, Germany. location:Leuven Belgium
Publication status: published
KU Leuven publication type: DI
Appears in Collections:Physics and Astronomy - miscellaneous
Electrical Engineering - miscellaneous

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