|ITEM METADATA RECORD
|Title: ||Comprehensive study of TSUPREM4 boron diffusion modeling in SiGeC base layers under critical RTA conditions|
|Authors: ||Sibaja-Hernandez, Arturo ×|
Maes, Herman #
|Issue Date: ||May-2004 |
|Host Document: ||pages:234-235|
|Conference: ||Program and Abstracts Book 2nd International SiGe Technology and Device Meeting - ISTDM location:Leuven Belgium date:16/05/04|
|Publication status: ||published|
|KU Leuven publication type: ||IC|
|Appears in Collections:||Associated Section of ESAT - INSYS, Integrated Systems|
× corresponding author|
# (joint) last author|
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