Title: Comprehensive study of TSUPREM4 boron diffusion modeling in SiGeC base layers under critical RTA conditions
Authors: Sibaja-Hernandez, Arturo ×
Xu, Mingwei
Decoutere, Stefaan
Maes, Herman #
Issue Date: May-2004
Host Document: pages:234-235
Conference: Program and Abstracts Book 2nd International SiGe Technology and Device Meeting - ISTDM location:Leuven Belgium date:16/05/04
Publication status: published
KU Leuven publication type: IC
Appears in Collections:Associated Section of ESAT - INSYS, Integrated Systems
× corresponding author
# (joint) last author

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